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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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Silicon Pressure Sensor On-Chip Temperature Compensated and Calibrated
The MPXT2010 Series silicon piezoresistive pressure sensors provide a very accurate and linear voltage output -- directly proportional to the applied pressure. These sensors house a single monolithic silicon die with the strain gauge and thin-film resistor network integrated on each chip. The sensor is laser trimmed for precise span and offset, both calibrated and temperature compensated. Features * Stress Isolated Top Piston Fit Package * Gauge Pressure Measurement * Temperature Compensated over 0 to + 85C * Unique Silicon Shear Stress Strain Gauge * Ratiometric to Supply Voltage * Available in Unibody Package (Case 344), See MPX2010 Series Data Sheet Application Examples * Respiratory Diagnostic Devices and Systems * Air Movement Control (HVAC) * Level Indicators * Controllers * Pressure Switching
MPXT2010 SERIES
COMPENSATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) FULL SCALE SPAN: 25 mV
BASIC ELEMENT CASE 473A-01
PIN NUMBER
1 2 3 4
VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY
Gnd +Vout VS -Vout
5 6 7 8
N/C N/C N/C N/C
NOTE: Pins 5, 6, 7, and 8 are not device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead.
2 4 Vout+ Vout-
X-ducer SENSING ELEMENT
1 GND
Figure 1. Calibrated and Temperature Compensated Pressure Sensor Schematic
Senseon and X-ducer are trademarks of Motorola, Inc.
REV 1
Motorola Sensor Device Data (c) Motorola, Inc. 1997
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MPXT2010 SERIES
MAXIMUM RATINGS(1)
Parametrics Overpressure(9) (P1 > P2) Burst Pressure(9) (P1 > P2) Storage Temperature Symbol Pmax Pburst Tstg Value 75 100 - 40 to +125 Unit kPa kPa C C
Operating Temperature TA - 40 to +125 1. TC = 25C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Offset(3) Full Scale Span(4) Sensitivity Linearity(5) Pressure Hysteresis(5) (0 to 10 kPa) Temperature Hysteresis(5) (- 40C to +125C) Temperature Effect on Offset(5) Temperature Effect on Full Scale Span(5) Input Impedance Output Impedance Response Time(6) (10% to 90%) Warm-up Time(7) Offset Stability(8) Symbol POP VS Io Voff VFSS V/P -- -- -- TCVoff TCVFSS Zin Zout tR -- -- Min 0 -- -- -1.0 24 -- -1.0 -- -- -1.0 -1.0 1300 1400 -- -- -- Typ -- 10 6.0 -- 25 2.5 -- 0.1 0.5 -- -- -- -- 1.0 20 0.5 Max 10 16 -- +1.0 26 -- +1.0 -- -- +1.0 +1.0 2550 3000 -- -- -- Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS mV %VFSS ms ms %VFSS
MECHANICAL CHARACTERISTICS
Characteristic Weight, Basic Element Symbol -- Min -- Typ 2.0 Max -- Unit Grams
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Warm-up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 8. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 9. Exposure beyond these limits may cause permanent damage or degradation to the device.
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Motorola Sensor Device Data
MPXT2010 SERIES
ON-CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 2 shows the output characteristics of the MPXT2010 series at 25C. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on full scale span and offset are small and are shown under Operating Characteristics. Figure 3 illustrates the differential/gauge die in the basic chip carrier (Case 473). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm.
30 OUTPUT (mVdc) 25 20 15 10 5 0 -5 kPa PSI
aMAX
TYP
SPAN RANGE (TYP) MIN
WIRE BONDS
2.5 0.362
5 0.725
7.5 1.09
10 1.45
OFFSET (TYP)
Figure 2. Output versus Pressure Differential
Figure 3. Cross-Sectional Diagram (not to scale)
The MPXT2010 series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + (sensitivity x P) over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end-point straight line fit, or (2) a least squares best line fit (see Figure 4). When calculating linearity, Motorola uses the end-point straight line fit. This method measures the two end and the mid range pressure points and compares to ideal. This typically represents the "worst case" error which is often more desirable for the customers when calculating an error budget in their designs.
air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
LEAST SQUARES FIT RELATIVE VOLTAGE OUTPUT EXAGGERATED PERFORMANCE CURVE LEAST SQUARE DEVIATION
OFFSET 0 50 PRESSURE (% FULLSCALE) 100
Figure 4. Linearity Specification Comparison ORDERING INFORMATION The MPXT2010G7U pressure sensor is available to be shipped in Rails.
Packing Options Rails Port Options Element Leadform 84 degree Case No. 473A-01 MPXS Series Order No. MPXT2010G7U Marking MPXT2010G
Motorola Sensor Device Data
EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE CCCC EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE
EPOXY CASE LEAD FRAME STRAIGHT LINE DEVIATION END POINT STRAIGHT LINE FIT
VS = 10 Vdc TA = 25C P1 > P2
STAINLESS STEEL METAL COVER DIE P1
FLUORO SILICONE DIE COAT
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MPXT2010 SERIES
PACKAGE DIMENSIONS
-A-
8 1
G S
-B-
4 5
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_TYPICAL DRAFT. 6. DIMENSION P TO CENTER OF LEAD WHEN FORMED PARALLEL.
DETAIL X DETAIL X R
DIM A B C F G J L M P R S U
P
U C L M F 8 PL 0.25 (0.010) M T B -T-
SEATING PLANE
INCHES MIN MAX 0.658 0.668 0.658 0.668 0.329 0.357 0.026 0.034 0.100 BSC 0.009 0.011 0.138 0.150 0_ 15 _ 0.738 0.748 0.503 0.523 0.002 0.020 0.135 0.145 GROUND +VOUT VSUPPLY -VOUT N/C N/C N/C N/C
MILLIMETERS MIN MAX 16.71 16.97 16.71 16.97 8.36 9.07 0.660 0.864 2.54 BSC 0.23 0.28 3.81 3.51 0_ 15_ 18.75 19.00 12.78 13.28 0.05 0.51 3.43 3.68
J
S
A
S
STYLE 2: PIN 1. 2. 3. 4. 5. 6. 7. 8.
CASE 473A-01 ISSUE A
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315
MfaxTM: RMFAX0@email.sps.mot.com - TOUCHTONE 602-244-6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, - US & Canada ONLY 1-800-774-1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298 INTERNET: http://motorola.com/sps
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