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| MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPX5100/D Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features * 2.5% Maximum Error over 0 to 85C * Ideally suited for Microprocessor or Microcontroller-Based Systems * Patented Silicon Shear Stress Strain Gauge * Available in Absolute, Differential and Gauge Configurations * Durable Epoxy Unibody Element * Easy-to-Use Chip Carrier Option VS MPX5100 SERIES INTEGRATED PRESSURE SENSOR 0 to 100 kPa (0 to 14.5 psi) 15 to 115 kPa (2.18 to 16.68 psi) 0.2 to 4.7 Volts Output MPX5100D CASE 867 SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY Vout PINS 4, 5 AND 6 ARE NO CONNECTS GND MPX5100DP CASE 867C Figure 1. Fully Integrated Pressure Sensor Schematic MPX5100GSX CASE 867F PIN NUMBER 1 2 3 Vout Gnd VS 4 5 6 N/C N/C N/C NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead. REV 7 Motorola Sensor Device Data (c) Motorola, Inc. 2001 1 MPX5100 SERIES MAXIMUM RATINGS(NOTE) Parametrics Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Tstg TA Value 400 -40 to +125 - 40 to +125 Unit kPa C C NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device. OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4 required to meet electrical specifications.) Characteristic Pressure Range(1) Gauge, Differential: MPX5100D Absolute: MPX5100A Symbol POP VS Io Offset(3) (0 to 85C) Voff VFSO VFSS -- V/P Time(7) tR Io+ -- -- Min 0 15 4.75 -- 0.088 4.587 3.688 -- -- -- -- -- -- -- -- Typ -- -- 5.0 7.0 0.20 4.700 3.800 4.500 3.600 -- 45 1.0 0.1 20 "0.5 Max 100 115 5.25 10 0.313 4.813 3.913 -- -- "2.5 -- -- -- -- -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc ms %VFSS Supply Voltage(2) Supply Current Minimum Pressure @ VS = 5.0 Volts Full Scale Output(4) @ VS = 5.0 Volts Full Scale Span(5) @ VS = 5.0 Volts Accuracy(6) Sensitivity Response Differential and Absolute (0 to 85C) Vacuum(10) Differential and Absolute (0 to 85C) Vacuum(10) Output Source Current at Full Scale Output Warm-Up Time(8) Offset Stability(9) NOTES: 1. 1.0kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MECHANICAL CHARACTERISTICS Characteristics Weight, Basic Element (Case 867) Typ 4.0 Unit grams 2 Motorola Sensor Device Data MPX5100 SERIES ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION and SIGNAL CONDITIONING Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C using the decoupling circuit shown in Figure 4. The output will saturate outside of the specified pressure range. 5 4.5 4 3.5 OUTPUT (V) 3 2.5 2 1.5 1 0.5 0 60 100 110 10 20 30 40 50 70 80 90 0 OFFSET (TYP) MIN VS = 5 Vdc TA = 25C MPX5100 MAX OUTPUT RANGE (TYP) TYP SPAN RANGE (TYP) DIE BOND PRESSURE (kPa) Figure 2. Output versus Pressure Differential WIRE BOND WIRE BOND LEAD FRAME DIFFERENTIAL/GAUGE ELEMENT DIE BOND LEAD FRAME Figure 3. Cross-Sectional Diagrams (Not to Scale) Figure 3 illustrates both the Differential/Gauge and the Absolute Sensing Chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX5100 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 4 shows the recommended decoupling circuit for interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended. +5 V Vout Vs IPS 1.0 mF 0.01 mF GND 470 pF OUTPUT Figure 4. Recommended power supply decoupling and output filtering. For additional output filtering, please refer to Application Note AN1646. Motorola Sensor Device Data EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE ABSOLUTE ELEMENT EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE FLUORO SILICONE GEL DIE COAT DIE STAINLESS STEEL METAL COVER EPOXY PLASTIC CASE FLUORO SILICONE GEL DIE COAT DIE STAINLESS STEEL METAL COVER EPOXY PLASTIC CASE 3 MPX5100 SERIES Transfer Function (MPX5100D, MPX5100G) Nominal Transfer Value: Vout = VS (P x 0.009 + 0.04) +/- (Pressure Error x Temp. Mult. x 0.009 x VS) VS = 5.0 V 5% P kPa Temperature Error Multiplier Break Points MPX5100D Series Temp - 40 0 to 85 +125 Multiplier 3 1 3 4.0 3.0 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 130 140 Temperature in C NOTE: The Temperature Multiplier is a linear response from 0 to -40C and from 85 to 125C. Pressure Error Band Error Limits for Pressure 3.0 2.0 Error (kPa) 1.0 0.0 -1.0 -2.0 -3.0 0 20 40 60 80 100 120 Pressure in kPa MPX5100D Series Pressure 0 to 100 kPa Error (max) 2.5 kPa 4 Motorola Sensor Device Data MPX5100 SERIES Transfer Function (MPX5100A) Nominal Transfer Value: Vout = VS (P x 0.009 - 0.095) +/- (Pressure Error x Temp. Mult. x 0.009 x VS) VS = 5.0 V 5% P kPa Temperature Error Multiplier Break Points MPX5100A Series Temp - 40 0 to 85 +125 Multiplier 3 1 3 4.0 3.0 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 130 140 Temperature in C NOTE: The Temperature Multiplier is a linear response from 0 to -40C and from 85 to 125C. Pressure Error Band 3.0 2.0 Error (kPa) 1.0 0.0 -1.0 -2.0 -3.0 0 20 Error Limits for Pressure 40 60 80 100 130 Pressure in kPa MPX5100A Series Pressure 15 to 115 kPa Error (max) 2.5 kPa Motorola Sensor Device Data 5 MPX5100 SERIES PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The Motorola MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the Table below: Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Side with Port Attached Part Number MPX5100A, MPX5100D MPX5100DP MPX5100AP, MPX5100GP MPX5100GSX Case Type 867 867C 867B 867F ORDERING INFORMATION: The MPX5100 pressure sensor is available in absolute, differential, and gauge configurations. Devices are available in the basic element package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure connections. MPX Series Device Name Basic Element Absolute Differential Ported Elements Differential Dual Ports Absolute, Single Port Gauge, Single Port Gauge, Axial PC Mount Options Case Type 867 867 867C 867B 867B 867F Order Number MPX5100A MPX5100D MPX5100DP MPX5100AP MPX5100GP MPX5100GSX Device Marking MPX5100A MPX5100D MPX5100DP MPX5100AP MPX5100GP MPX5100D 6 Motorola Sensor Device Data MPX5100 SERIES PACKAGE DIMENSIONS C R M B -A- N PIN 1 SEATING PLANE 1 2 3 4 5 6 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). DIM A B C D F G J L M N R S OPEN GROUND +VOUT +VSUPPLY -VOUT OPEN INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66 L -T- G F D 6 PL 0.136 (0.005) M J S TA M STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX STYLE 2: PIN 1. 2. 3. 4. 5. 6. OPEN GROUND -VOUT VSUPPLY +VOUT OPEN STYLE 3: PIN 1. 2. 3. 4. 5. 6. CASE 867-08 ISSUE N BASIC ELEMENT T R SEATING PLANE A U L V NOTES: 1. DIMENSIONS ARE IN MILLIMETERS. 2. DIMENSIONS AND TOLERANCES PER ASME Y14.5M, 1994. MILLIMETERS MIN MAX 29.08 29.85 17.4 18.16 7.75 8.26 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.1 23.11 BSC 4.62 4.93 VOUT GROUND VCC V1 V2 VEX N Q B 1 2 3 4 5 6 Q K S P C J 0.25 M PIN 1 P TQ M G F 6X D 0.173 DIM A B C D F G J K L N P Q R S U V M TP S Q S CASE 867B-04 ISSUE F PRESSURE SIDE PORTED (AP, GP) STYLE 1: PIN 1. 2. 3. 4. 5. 6. Motorola Sensor Device Data 7 MPX5100 SERIES PACKAGE DIMENSIONS-CONTINUED NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K L N P Q R S U V W X INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.182 0.194 0.310 0.330 0.248 0.278 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 4.62 4.93 7.87 8.38 6.30 7.06 P 0.25 (0.010) X R PORT #1 POSITIVE PRESSURE (P1) PORT #2 VACUUM (P2) M TQ M -A- U W L V PORT #2 VACUUM (P2) N PORT #1 POSITIVE PRESSURE (P1) -Q- B PIN 1 1 2 3 4 5 6 K S C SEATING PLANE -T- -T- J SEATING PLANE G F D 6 PL 0.13 (0.005) M A M CASE 867C-05 ISSUE F PRESSURE AND VACUUM SIDES PORTED (DP) VOUT GROUND VCC V1 V2 VEX -T- C E A U -Q- NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.93 V N B R PIN 1 PORT #1 POSITIVE PRESSURE (P1) -P- 0.25 (0.010) M TQ M 6 5 4 3 2 1 S K J 0.13 (0.005) M TP S D 6 PL QS F G VOUT GROUND VCC V1 V2 VEX CASE 867F-03 ISSUE D PRESSURE SIDE AXIAL PORT (GSX) 8 Motorola Sensor Device Data MPX5100 SERIES Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. How to reach us: USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1-303-675-2140 or 1-800-441-2447 Technical Information Center: 1-800-521-6274 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3-20-1, Minami-Azabu. Minato-ku, Tokyo 106-8573 Japan. 81-3-3440-3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2, Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852-26668334 HOME PAGE: http://www.motorola.com/semiconductors/ Motorola Sensor Device Data 9 MPX5100/D |
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