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FBA Series
Mass flow sensors for gases
FEATURES * Ranges 0...30 to 0...1000 sccm1 * 1...5 V or 1...3.75 V output * Actual mass flow sensing * Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only The FBA series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor
SPECIFICATIONS
Maximum ratings Supply voltage2 8 to 15 V typ. 10 0.01 V
ELECTRICAL CONNECTION
P1
P2
Power consumption FBAL001DB all others Temperature limits Operating Storage Mechanical shock
typ. 100 mW typ. 50 mW, max. 60 mW
-25 to 85C -40 to 90C 100 g (5 drops, 6 axes)
123
Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage
Pin 1: Vout Pin 2: +Vs Pin 3: GND
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FBA Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS3
(VS = 10 0.01 V, TA = 25C)
Part no.
FBAM200DU FBAM030DU F B A L001D U F B A L001D B
Flow range (full scale)
2 0 0 sccm 3 0 sccm 1 0 0 0 sccm 1000 sccm
Max. flow change4
5.0 l/sec 5.0 l/sec 5.0 l/sec 5.0 l/sec
Output voltage @ trim point
5 V @ 2 0 0 sccm 3.4 V @ 25 sccm 5 V @ 1 0 0 0 sccm 5 0.15 V
PERFORMANCE CHARACTERISTICS
(VS = 10 0.01 V, TA = 25C)
Characteristics
Zero offset FBAM200DU FBAM030DU F B A L001D U F B A L001D B Repeatability and hysteresis (combined) Temperature effects Offset -25 to 85 C5 FBAM200DU all others FBAM030DU F B A L001D B all others Span -25 to 25 C FBAM200DU FBAM030DU FBAL001... 25 to 85 C FBAM200DU FBAM030DU FBAL001... Response time
6
Min.
0.95 0.90 0.90 2.95
Typ.
1.0 1.0 1.0 3.0
Max.
1.05 1.10 1.10 3.05 0.5 1.0
Unit
V
% reading
100 50 25 -4.0 5.0 -5.0 4.0 5.0 5.0 1.0 3.0 25 ms p si % reading mV
Common mode pressure
Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Shift is relative to 25 C. 6 Initial warm-up time for signal conditioned circuitry is 1 minute max.
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FBA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(VS = 10 0.01 V, TA = 25C)
FBAM200DU
Press. (mbar) 0.49 0.42 0.35 0.28 0.21 0.14 0.09 0.04 0.00 Flow (sccm)7 200 175 150 125 100 75 50 25 0 Nom. (VDC) 5.00 4.80 4.50 4.17 3.75 3.27 2.67 1.90 1.00 Tol. ( VDC) 0.15 0.16 0.17 0.18 0.19 0.19 0.17 0.13 0.05 Press. (mbar) 2.50 1.70 0.84 0.42 0.34 0.26 0.17 0.08 0.00
FBAM030DU
Flow (sccm)7 30 20 10 5 4 3 2 1 0 Nom. (VDC) 3.75 2.90 1.95 1.50 1.40 1.30 1.20 1.10 1.00 Tol. ( VDC) 0.70 0.45 0.20 0.10 0.08 0.08 0.07 0.06 0.05 Press. (mbar) 3.40 2.90 2.40 2.00 1.60 1.20 0.80 0.54 0.31 0.12 0.00
FBAL001DU
Flow (sccm)7 1000 900 800 700 600 500 400 300 200 100 0 Nom. (VDC) 5.00 4.90 4.80 4.66 4.42 4.18 3.82 3.41 2.96 2.30 1.00 Tol. ( VDC) 0.15 0.16 0.17 0.18 0.19 0.20 0.21 0.19 0.17 0.14 0.10 Press. (mbar) 3.49 2.42 1.59 0.83 0.31 0.00 -0.31 -1.59 -2.42 -3.44
FBAL001DB
Flow (sccm)7 1000 800 650 400 200 0 -200 -600 -800 -1000 Nom. (VDC) 5.00 4.82 4.67 4.42 3.96 3.00 2.03 1.35 1.15 1.00 Tol. ( VDC) 0.15 0.18 0.20 0.20 0.15 0.05 0.18 0.25 0.30 0.35
Note: 7 Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
OUTPUT VS. FLOW CURVES
FBAM200DU FBAM030DU
FBAL001DU
FBAL001DB
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FBA Series
Mass flow sensors for gases
OUTLINE DRAWING
7.60 (0.30) 2.8 (0.11) 2.9 (0.114) 1.40 (0.055) 6.3 (0.25) 1.8 (0.07) 5.1 (0.20) 8.3 (0.325) 54.4 (2.14) 8.4 (0.33)
P1
P2
31.5 (1.24) 23.6 (0.93) 2.8 (0.11)
1.0 (0.04) 5.1 (0.20) 7.4 (0.29) 23.9 (0.94) 30.5 (1.20) 12.7 (0.50) 15.5 (0.61)
123 0.6 (0.025) 1.52 (0.06) 2.5 (0.10)
4.1 (0.16)
third angle projection mass: approx. 10.8 g dimensions in mm (inches)
Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output.
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FBA Series
Mass flow sensors for gases
GAS CORRECTION FACTORS8
Gas type
Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2)
Correction factor (approx.)
0.59 0.79,10 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35
Notes: 8 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 9 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 10 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number.
ORDERING INFORMATION - AVAILABLE LISTINGS
Note: Preferred listings are highlighted in grey
Flow range
0...30 sccm 0...200 sccm 0...1000 sccm 0...1000 sccm
Dry gas
FBAM030DU FBAM200DU F B A L001D U F B A L001D B
Sensortechnics PRO services: * Extended guarantee period of 2 years * Improved performance characteristics * Custom product modifications and adaptations even for small quantities * Advanced logistics models for supply inventory and short delivery times * Technical support through application engineers on the phone or at your site * Fastest possible technical response for design and QA engineers ... plus other services on request
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11722 / A 5/5
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