agilent twistorr 84fs split flow agilent quality assured datasheet dimensions: millimeters [inches] technical specifcations main pumping speed iso 63 n 2 l/s 54 he l/s 50 h 2 l/s 52 gas throughput at full rotational speed air cooling water cooling (with recommended forepump) (35c) (25c, 65 l/h) n 2 100 sccm 100 sccm k-ratio main-side main-foreline n 2 >10 +5 >10 +10 he >10 +5 >10 +5 ar >10 +5 >10 +10 inlet port base pressure with recommended forepump (5 m 3 /h) < 5 x 10 -9 mbar (< 3.75 x 10 -9 torr) inlet flange iso 63 side port flange kf16 nw foreline flange kf16 nw rotational speed 81000 rpm (1350 hz driving frequency) start-up time < 2 minutes recommended forepump mechanical: agilent ds 40m / ds 102 dry pump: agilent idp-3 / sh 110 operating position any operating ambient temperature +5 c to +35 c relative humidity of air 0 - 90 % (not condensing) bakeout temperature 80c at inlet iso flange lubricant permanent lubrication cooling requirements - air cooling air flow temperature +5c to +35 c - water cooling cooling water temperature: +15 c to +25 c minimum flow: 65 l/h (0.30 gpm) pressure: 2 to 4 bar (45 to 75 psi) noise pressure level (at 1 mt at full speed) 40 db(a) * storage temperature -40 c to +70 c max altitude 3000 m certifications ce, c-csa-us, rohs compliant as per 2011/65/ue weight kg (lbs) pump iso 63 kg 2.05 *average value 4 db(a) std deviation the 84fs split flow turbo pump takes advantage of all standard agilent 84fs pump features and benefts, providing, in addition, a solution for applications with multiple chambers to be pumped as gc-ms, sem, etc.
agilent twistorr 84fs split flow datasheet side port pumping speed 0 0,5 1 1,5 2 2,5 3 3,5 4 1,00e-03 1,00e-02 1,00e-01 1,00e+00 side port pumping speed (l/s) side port pressure (mbar) side port pumping speed nitorgen helium argon side port pressure (mbar) slide port pumping speed (l/s) main/side port compression ratio 1,0e+00 1,0e+01 1,0e+02 1,0e+03 1,0e+04 1,0e+05 1,0e+06 1,0e-03 1,0e-02 1,0e-01 1,0e+00 main/side compression ratio side port pressure ( mbar ) nitrogen helium argon side port pressure (mbar) main/side compression ratio side port vs foreline compression ratio 1,0e+00 1,0e+01 1,0e+02 1,0e+03 1,0e+04 1,0e+05 1,0e+06 1,0e-02 1,0e-01 1,0e+00 1,0e+01 1,0e+02 side vs foreline compression ratio foreline pressure (mbar) side port vs foreline compression ratio side port nitrogen side port helium side port argon foreline pressure (mbar) side vs foreline compression ratio main port pumping speed 0,0 10,0 20,0 30,0 40,0 50,0 60,0 1,00e-08 1,00e-07 1,00e-06 1,00e-05 1,00e-04 1,00e-03 1,00e-02 1,00e-01 1,00e+00 main port pumping speed (l/s) main port pressure (mbar) main port pumping s peed nitrogen helium argon main port pressure (mbar) main port pumping speed (l/s) main port vs foreline compression ratio 1,0e+00 1,0e+01 1,0e+02 1,0e+03 1,0e+04 1,0e+05 1,0e+06 1,0e+07 1,0e+08 1,0e+09 1,0e+10 1,0e+11 1,0e-02 1,0e-01 1,0e+00 1,0e+01 1,0e+02 main vs foreline compression ratio foreline pressure (mbar) m a i n p or t vs f ore li ne c ompress i on r a ti o main port nitrogen main port helium main port argon foreline pressure (mbar) main vs foreline compression ratio
agilent twistorr 84fs split flow datasheet ordering information united states agilent technologies 121 hartwell avenue, lexington ma 02421, usa tel: +1 781 861 7200, fax: +1 781 860 5437 - toll free: +1 800 882 7426 e urope and other countries agilent technologies italia spa via f.lli varian 54, 10040 leini, (torino), italy tel: +39 011 9979 111, fax: +39 011 9979 350 toll free: 00 800 234 234 00 this information is subject to change without notice. ? agilent technologies, inc. 2017 published in italy, march, 2017 pumps part numbers twistorr 84fs split flow x3502-64300 controllers part numbers twistorr 84fs ag rack controller rs232/485 x3508-64001 twistorr 84fs ag rack controller profibus x3508-64002 twistorr 84fs on-board controller 110/220v x3509-64000 twistorr 84fs on-board controller 24v x3509-64001 twistorr 84fs pcb controller x3510-64000 accessories part numbers cables mains cable nema plug, 3 m long 969-9958 mains cable european plug, 3 m long 969-9957 serial cable and t-plus software 969-9883 pcb cable 969-9869 pump extension cable (3 m) 969-9942 extension cable 5 m 969-9942m007 extension cable 10 m 969-9942m006 extension cable 15 m 969-9942m005 extension cable 20 m 969-9942m004 inlet screen inlet screen iso63 x3502-68001 cooling metal water cooling kit x3502-68002 plastic water cooling kit x3502-68003 air cooling kit (0,5 m cable) 969-9290 air cooling kit extension cable (5 m) 969-9940 vibration isolator vibration isolator iso 63 969-9375 venting vent valve n.o. 0,5 mm orifice (0,5 m cable) 969-9844 vent valve extension cable (5 m) 969-9941 vent valve extension cable (10 m) 969-9941m003 vent valve extension cable (15 m) 969-9941m001 vent valve extension cable (20 m) 969-9941m005 vent screw m5 x3502-68005 vent adapter kit m5-m8 X1699-64039 purge purge screw x3502-68004 purge valve 10 sccm nw16kf - m12 969-9239 purge valve 10 sccm ? swagelok - m12 969-9240 purge valve 20 sccm nw16kf - m12 969-9241 purge valve 20 sccm ? swagelok - m12 969-9242 purge valve 10 sccm ? swagelok - ? swagelok 969-9232 purge valve 20 sccm ? swagelok - ? swagelok 969-9236 mounting controller side mounting bracket x3502-68006 active gauges frg 700 full range gauge ask agilent for details pvg 500 pirani vacuum gauge ask agilent for details pcg 750 pirani capacitance gauge ask agilent for details cdg-500 capacitance diaphragm gauge ask agilent for details
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